SURFIEW 1000

Semiconductor

PCB

Substrate (Pad, Trace, Space, Anchor, Land, Ball Pad, Via Hole, Dimple, SR)	高さ、幅、深さ、長さ、厚み、体積、粗さ、Roundness
BGA	Ball高さ、長さ、Coplanarity

Display

その他

Specification

Vertical Resolution	VSI,VEI < 0.5nm, VPI < 0.1nm
Lateral Resolution	0.05~7.2um(Depends on magnification)
Height Repeatability	≤0.1% @ 1σ
Objective Lens	5 Selectable(Manual)
Zoom Lens	1 Selectable(1.0x @ Manual)
Camera Format	1/2" Mono Camera
Scan Method	Piezo Actuator @ Capacity Closed loop
PZT Scan Range	≤150um
Scan Speed	7.5um/sec(1x) / 22.5um/sec(3x)
Illumination	White LED
Filter	Visible/Bandpass Filter(Auto)
X/Y Axis Stroke	50mm(X) x 50mm(Y)
Z Aixs Stroke	Coarse&Fine: 50mm
Tilt Aixs Stroke	± 3°
Work Table Size	100mm X 100mm
Max Workpiece Load	≤ 1kg
Layout Size	1300mm(W) x 700mm(D) x 1640mm(H)
Software	Surface View/Surface MAP@ Window10 (64bit)
Stitching	NO
Vibration Isolation Platform	Passive Type(Vertical Resonance: 2.5Hz)
Input Power	2∮,110V/220V(±10%), 50/60Hz