| SURFIEW 6000 | ||
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Semiconductor  |
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PCB  |
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Display  |
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その他  |
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Specification
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Vertical Resolution
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VSI,VEI < 0.5nm, VPI < 0.1nm
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Lateral Resolution
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0.05~7.2um(Depends on magnification)
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Height Repeatability
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≤0.1% @ 1σ
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Objective Lens
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5 Selectable(Automatic)
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Zoom Lens
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3 Selectable(0.55x/1.0x/1.5x @ Automatic)
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Camera Format
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1/2" Mono Camera
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Scan Method
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Piezo Actuator@Capacity Closed loop
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PZT Scan Range
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≤300um
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Scan Speed
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7.5um/sec(1x) / 22.5um/sec(3x)
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Illumination
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White LED
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Filter
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Visible/Bandpass/Green Filter(Auto)
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Auto Focus
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Yes
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X/Y Axis Stroke
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600mm(X) x 600mm(Y)
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Z Aixs Stroke
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50mm
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Tilt Aixs Stroke
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None
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Work Table Size
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650mm X 650mm (Vacuum Type)
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Max Workpiece Load
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≤ 10kg
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Layout Size
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2200mm(W) x 1800mm(D) x 2100mm(H)
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Software
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Surface View/Surface MAP@ Window10 (64bit)
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Stitching
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Yes
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Vibration Isolation Platform
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Passive Type(Vertical Resonance: 1.5Hz)
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Input Power
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2∮,110V/220V(±10%), 50/60Hz
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Option
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Interference Lens
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2.5x, 5.0x, 10x, 20x, 50x, 100x
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Objective Lens
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2.5x, 5.0x, 10x, 20x, 50x, 100x
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Zoom Lens
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0.55x, 0.75x, 1.0x, 1.5x, 2.0x
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Motor Scan
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≤10mm@Linear Scale
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Laser Auto Focus
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Option
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Camera Format
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2/3" or 1" Mono Camera
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Work Table
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Vacuum Table, Rotation Table
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